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Design and Fabrication of Solenoid-Based Silicon Wafer Gripping Mechanism for Photolithography


Sumin Mathew , College of Engineering Trivandrum; Prof. Ajith R. R., College of Engineering Trivandrum; Dr. Ranjith S. Kumar, College of Engineering Trivandrum


Photolithography, Automation, Wafer, Gripper


Photolithography is a micro-fabrication process widely used for integrated chip manufacturing. This microfabrication technique is also used for the fabrication of microfluidic devices like Lab on Chip (LoC), Organ- on chips etc. As of now, automation has become a standard in almost all manufacturing processes. Automation reduces cost of the product and the human errors that may arise, making it very popular. By developing a table-top photolithography unit, the entire process can be fully automated. This will also eliminate the need of a clean-room. The work shown below aims at designing and fabricating a silicon wafer gripping mechanism for small-scale photolithography unit. The gripper is the most important part of a photolithography unit as it has to handle the brittle silicon wafer safely while picking and placing as well as during the transfer of the wafer from one working station to another. The presented work shows a gripper, operating, in principle, similar to a solenoid. Instead of using vacuum suction or robotic arms to pick and place the silicon wafer, here a simple mechanical device is fabricated to handle the wafer.

Other Details

Paper ID: IJSRDV7I31195
Published in: Volume : 7, Issue : 3
Publication Date: 01/06/2019
Page(s): 1757-1760

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