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A high speed portable XY flexure-based Nanopositioning stage

Author(s):

T Narendra Reddy , NITK; Vithun S N, CMTI; Prakash Vinod, CMTI; Mervin Herbert, NITK; Shrikantha S.Rao, NITK

Keywords:

Piezo-based Systems, Flexure, Nanopositioning System, Closed Loop System

Abstract

Nano positioning systems are widely used in nanotechnology equipments such as Scanning Probe Microscopes (SPM), Nanofabrication systems etc., This paper is mainly focused on the development of portable XYZ nano positioning stage which can provide nano-metric motions at high speed with nanometer resolutions. The work includes design considerations for flexure based nano positioning systems, fabrication of monolithic flexure based stage, integration of piezo-actuators and capacitive sensors. The developed nano positioning system has been tested for resolution, linearity’s, hysteresis, creep and thermal drift in open-loop and closed loop.

Other Details

Paper ID: IJSRDV4I60400
Published in: Volume : 4, Issue : 6
Publication Date: 01/09/2016
Page(s): 868-871

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