Efficient Designing and Optimization of Nano-Cavity Photonic-Crystal based Pressure Sensor

In this paper, we proposed a compact photonic crystal based double hole nano cavity pressure Sensor. The Pressure Sensor is designed by introducing double hole nano-cavity with some side holes in the middle of line defect waveguide. This increases sensor Sensitivity, Quality factor and Resolution factor. Nano Pressure sensor works on the principle of resonance wavelength shift, with the applied pressure. According to the results of proposed design, the shift of resonant wavelength lies in the Optical range. This sensor works in optical S and C band. The sensitivity of silicon membrane based Pressure Sensor is 0.50nm/GPa and its minimum detectable pressure is 0.04 nN. By using plane wave expansion (PWE) method band gap of the structure is evaluated. Finite difference time domain (FDTD) method is utilized for computation of transmission power and field distribution of proposed sensor.